| 摘要 |
PROBLEM TO BE SOLVED: To improve the state where ON-OFF frequency in a heater for temperature control to a development processing liquid is made incessant, and to improve the service life of the heater. SOLUTION: In the temperature control method for a development processing liquid in a development processor device provided with: a heater for heating a development processing liquid stored in a processing tank for development processing; and a cooling fan for cooling the development processing liquid, the atmospheric temperature in the device body is detected by a first temperature sensor, further, the atmospheric temperature in the outside of the device body is detected by a second temperature sensor, and, if the difference in the atmospheric temperatures between the inside and the outside is a prescribed value or higher, the cooling fan is operated in a state its revolving speed is reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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