| 摘要 |
PROBLEM TO BE SOLVED: To provide a slider to be stably floated while reducing the deformation of itself even if having low rigidity. SOLUTION: The slider comprises partition grooves connected to each other for partitioning one face of a plate member in predetermined areas and at least one gas jet hole provided in each of regions partitioned with the partition grooves. The partition grooves and the jet holes are arranged so that the moment of force on the plate member is minimized when the plate member is placed at its side of the partition grooves on a stage and gas is jetted from the jet holes. COPYRIGHT: (C)2006,JPO&NCIPI
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