Fabrication method of nanoimprint mold core

摘要

A fabrication method of a nanoimprint mold core includes providing a substrate having a photo phase change surface; performing a phase change on the photo phase change surface to form at least one first area and at least one second area; at least partially removing the first area to form a nano pattern; performing an imprinting process using the substrate having the nano pattern; and performing a mold release process so as to obtain the mold core. This achieves the advantages of low cost, high yield, and easy fabrication of the mold core.