发明名称 Microelectronic device and a method for its manufacture
摘要 Provided are a microelectronic device and a method for its manufacture. In one example, the method includes providing a semiconductor substrate layer having a first material (e.g., silicon or silicon germanium). An insulating layer is formed on the semiconductor substrate layer with multiple openings exposing portions of the surface of the semiconductor substrate layer. A semiconductor layer is then formed in the openings directly upon the exposed portions of the semiconductor substrate layer using a second material different from the first material (e.g., silicon germanium or silicon). In other examples, multiple semiconductor layers may be formed using alternating materials.
申请公布号 US2006110887(A1) 申请公布日期 2006.05.25
申请号 US20040994841 申请日期 2004.11.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HUANG CHIEN-CHAO
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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