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发明名称	APPARATUS AND METHOD FOR TREATING SUBSTRATES
摘要
申请公布号	KR100583726(B1)	申请公布日期	2006.05.25
申请号	KR20030079859	申请日期	2003.11.12
申请人		发明人
分类号	B65D85/86;H01L21/68;B65G49/00;H01L21/00;H01L21/673;H01L21/677	主分类号	B65D85/86
代理机构		代理人
主权项
地址

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