| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a device therefor realizing stable microfabrication with high precision by an ultrashort pulse laser. <P>SOLUTION: A first machining phenomenon appearing at a threshold fluence lower than a machining threshold fluence required for realizing desired laser beam machining is induced in a fixed region at the surface and inside of the material of the object 6 to be machined by a laser pulse passed through an optical path 2 for lower bulkhead phenomenon induction. The region modified by the first machining phenomenon is irradiated with a threshold fluence stronger than the threshold fluence inducing the first machining phenomenon by a laser pulse passed through an optical path 3 for upper threshold phenomenon induction, and a second machining phenomenon is induced in the above modified region, thus the modified region is preferentially or exclusively machined. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
