| 摘要 |
PROBLEM TO BE SOLVED: To obtain the state analysis of a sample in a two-dimensional image with an improved S/N ratio by the amount of irradiation of electron rays for restraining damage by irradiating the sample with electron rays. SOLUTION: A method for analyzing a sample using the energy filter of a transmission electron microscope or a scanning type transmission electron microscope comprises a step for irradiating a desired observation region with electrons; a process for obtaining an EELS spectrum by making the spectral diffraction of the energy of electrons through the sample by the energy filter; a step for obtaining the position and intensity of peaks by plasmon loss electrons in the EELS spectrum; and a step for obtaining the two-dimensional image with the position and intensity of peaks in the plasmon loss electrons as color information and luminance information. COPYRIGHT: (C)2006,JPO&NCIPI
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