| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that the high frequency power measurement device capable of measuring the injected power into the plasma by measuring the transmitted high frequency power, or capable of imparting the transmission loss in a specific area or an abnormal loss (high frequency discharge etc.) of apparatus constituting the transmission circuit by measuring the high frequency power at an arbitrary position hadn't been existed in the past. SOLUTION: The high frequency power measurement device is composed of the high frequency power detection part, absorption power retaining part, driver part, heat insulation part, heat evacuation part, detector fixing part, wave guide tube, movable wave guide tube and vacuum evacuation port. During high frequency power measurement, the power detection part is moved into the wave guide tube of the high frequency wave transmission circuit, the high frequency wave of large power transmitted in the wave guide tube is made to directly pass the dielectric material of the detection part, then the high frequency power converted into the heat is measured in terms of temperature, and when the power measurement is over, the power detection part is moved out of the transmission circuit and stored for filling the gap of the wave guide tube. COPYRIGHT: (C)2006,JPO&NCIPI
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