INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To enhance alignment precision in order to enhance a comparing inspection capacity.

SOLUTION: When the misregistration amount of the representative noticeable pixel in a representative pixel region is calculated, the misregistration amount of each peripheral noticeable pixel in the peripheral pixel region group allowed to get out to the periphery of the representative pixel region being a statistic processing region (voting target region) is subjected to statistic processing (voting processing) to determine misregistration amount of high frequency. The correct solution of alignment is enhanced by utilizing the misregistration amount of high frequency.

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