| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface property measuring instrument capable of performing calibration of high accuracy. <P>SOLUTION: The surface property measuring instrument is equipped with a near-field probe 33 constituted so as to form a near-field beam at its leading end part, when irradiated with a laser beam, a laser beam source 35 for emitting the laser beam for irradiating the near-field probe, a photon detector 38 for detecting the scattering effect of the near-field beam emitted, when the near-field probe and a measuring target 1 approach each other and a near-field measuring means 30, having an actuator 32 for displacing the near-field probe and the measuring target in the approaching and separating directions. A laser length measuring means 20, for measuring the relative distance between the reference surface 24 and the measuring target in the vicinity of the leading end part of the near-field probe or the relative distance between a reference position and the near-field probe, is provided to the surface-property measuring instrument. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
