| 摘要 |
PROBLEM TO BE SOLVED: To improve treatment efficiency and treatment quality by quickly washing away unnecessary liquid from a substrate on the way of the horizontal transportation of substrates to be treated in a flat flowing system. SOLUTION: In this washing process unit 24, rollers 112 inclined at certain angles are arranged at constant pitches to structure an inclined transport passage 114, and ultraviolet rays ozone washing, scrubbing washing, rinse and drying are performed in order to an inclined substrate G moving on the inclined transport passage 114 by an ultraviolet rays lamp 122, a roll brush 130, a rinse nozzle 134 and an air knife 136 or the like. When performing scrubbing washing and rinse, foreign materials and liquid are quickly washed away from the inclined substrate G by gravity. COPYRIGHT: (C)2006,JPO&NCIPI |
