| 摘要 |
PROBLEM TO BE SOLVED: To provide panel cleaning equipment which enables a cleaning of both surfaces of a panel in a short time and a space-saving of the equipment. SOLUTION: This panel cleaning equipment 10 comprises a panel conveying means for conveying the panel P, a panel cleaning means for cleaning a first surface and a second surface of the panel P, and a panel washing and drying means for washing and drying the first surface and the second surface of the panel P. The panel conveying means comprises a first, a second, and a third panel rotating carriers 11, 12, and 13, which rotate while holding the panel P, and convey the panel P, and a first and a second panel moving means 14 and 15, which move the panel P between the first and the second panel rotating carriers 11 and 12, and move the panel P between the second and the third panel rotating carriers 12 and 13. COPYRIGHT: (C)2006,JPO&NCIPI
|
