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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH AIR CURTAIN IN DOOR ENTRANCE
摘要
申请公布号
KR20060056709(A)
申请公布日期
2006.05.25
申请号
KR20040095889
申请日期
2004.11.22
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, YOUNG HO
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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