METHOD TO REMOVE THINGS DEPOSITED IN OPTICAL ELEMENTS, METHOD TO PROTECT OPTICAL ELEMENTS, DEVICE MANUFACTURING METHOD, APPARATUS CONTAINING OPTICAL ELEMENTS, AND LITHOGRAPHY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method to remove things deposited in optical elements in an apparatus containing optical elements, and a method to protect optical elements in the apparatus.

SOLUTION: The method to remove things deposited in an optical device in an apparatus containing optical elements comprises supply of H2content gas to at least part of the apparatus, generation of hydrogen radicals from H2of the H2content gas, and removal of at least part of the deposits by making optical elements having deposits contact at least part of the hydrogen radicals. In addition, the method to protect optical elements comprises supply of a cap layer to the optical elements in a depositing process and removal of at least part of the cap layer from the optical elements in the foregoing removal process when the apparatus is being used or after it is used. This method is applicable to the lithography apparatus.

COPYRIGHT: (C)2006,JPO&NCIPI