| 摘要 |
<P>PROBLEM TO BE SOLVED: To precisely control pressure in space defined by a mask and a space definition member provided to the mask, and hence to precisely control the shape of the mask. <P>SOLUTION: An aligner comprises a mask stage MST for moving the mask M with a deflection control unit (the space definition member) 1 for defining space S with the surface of the mask M as a boundary; a pressure sensor 11 for detecting the pressure in the space S; and a pressure controller PRC for controlling the pressure in the space S, based on the output of the pressure sensor 11. The pressure sensor 11 is arranged for example on the mask stage MST, and moves while the pressure sensor 11 maintains a nearly fixed position relationship to the mask M. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
