| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the kind of containable nozzles in flexibility. <P>SOLUTION: A nozzle station 19 is equipped with nozzle containing holes 303 and 304. Exchanging nozzles 21 are contained in the containing holes 303 and 304, respectively. An adaptor 40 is fixed on the inner bottom of one (the nozzle containing hole 304) of the nozzle containing holes 303 and 304, and the nozzle 21 is contained in the containing hole 304 as it is supported by the adaptor 40. The adaptor 40 is equipped with a support unit 40a corresponding to the shape of the nozzle 21, the support unit 40a is fixed in a detachable manner in the nozzle containing hole 304 and, when the nozzle 21 having the other shape is contained, the existent adaptor 40 is replaced with the other adaptor 40 equipped with the support unit 40a corresponding to the nozzle 21 having the other shape. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
