| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for detecting the central position of a measuring object, capable of determining the center of the measuring object without using a CCD camera or needing complicated arithmetic processing. SOLUTION: A measuring object having four sides, for example, is irradiated with light to determine, with respect to the vertical sides, three points of two points on one side and one point of the other side. The inclination from a reference line is determined from the two points of the one side of the vertical sides. Thereafter, the interval between the two point of the one side is calculated. With respect to the horizontal sides, three points are determined similarly to the vertical sides to determine the inclination and the like. Consequently, the center of the measuring object can be calculated from the inclination and interval for the three points of the vertical sides and the inclination and interval for the three points of the horizontal sides. The slippage (rotation error) from the refference position of this quadrilateral can be determined from the center of the quadrilateral. COPYRIGHT: (C)2006,JPO&NCIPI
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