| 摘要 |
PROBLEM TO BE SOLVED: To perform inspection with high accuracy, regardless of the inclination of receiving horn parts 12, 13 in a high-frequency component 1 and reduces or prevents damages to the receiving horn parts 12, 13 and inspection heads 4, 4 in the high-frequency component 1. SOLUTION: Since the inspection head 4 is allowed to change its attitude using a coupling member 5, alignment parts 42, 42 of the inspection heads 4, 4 are made to be fitted automatically to enlarged diameter opening parts 12b, 13b of the receiving horn parts 12, 13 so that their attitudes are aligned with each other, even if the attitude of the receiving horn parts 12, 13 of the high-frequency part 1 is inclined. COPYRIGHT: (C)2006,JPO&NCIPI
|
