发明名称 POSITIONING DEVICE AND EXPOSURE APPARATUS USING THE SAME, AND METHOD OF MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To cause either (1) a decrease in drive efficiency, (2) an increase in vehiclesize, and (3) an increase in cost by providing a magnet to move in a rotating direction in a positioning device which moves a moving body at least in two dimensions that uses the magnet and a coil. <P>SOLUTION: The positioning device having the moving body which has a plurality of magnets and in order to move the moving body in XY directions and a plurality of coils aligned in each direction includes a first magnet unit for generating forces from the plurality of magnets in the XY directions, and a second magnet unit for generating a force in a rotating direction around a Z-axis. The second magnet unit is provided so that at least part of the coil for generating a force in the X direction generates a force in the rotating direction around the Z-axis so that the coil for generating the force in the Y direction does not generate a force in the rotating direction around the Z-axis direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006136154(A) 申请公布日期 2006.05.25
申请号 JP20040323759 申请日期 2004.11.08
申请人 CANON INC 发明人 ASANO TOSHIYA
分类号 H02K41/03;H01L21/027 主分类号 H02K41/03
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