STRUCTURE OF CONNECTION BETWEEN HEATING ELEMENT AND POWER SUPPLY MECHANISM IN HEATING CVD DEVICE

摘要

PROBLEM TO BE SOLVED: To improve characteristics of a film to be formed and stability in the CVD device of a heating element with a connecting terminal holder installed within one or more treatment containers, the connecting terminal holder being adapted to hold a plurality of connecting terminals each for electrically connecting the heating element and a power supply mechanism at a predetermined position while attaining electrical insulation, and to support the heating element connected to the relevant connecting terminal while facing a substrate holder so that a connecting portion area of the heating element connected to the connecting terminal can not be exposed in the space within the treatment containers. SOLUTION: A connecting pin with a diameter greater than that of a heating element is prepared in the terminal of the heating element; and the connecting pin is inserted into the small hole of the pin holder of a connecting terminal which includes the small hole with an inner diameter smaller than the diameter of the connecting pin, and which comprises a slot extending in an axial direction on a peripheral wall forming the small hole. COPYRIGHT: (C)2006,JPO&NCIPI