| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a substrate in which a pattern that is relatively wide and has a large film thickness can be formed by a liquid-drop discharge method. SOLUTION: The manufacturing method manufactures a substrate (10) having a patterned functional film. The method comprises the steps of forming a groove pattern (12) on the substrate (10) by laser irradiation (11), disposing a liquid material (13) along the groove pattern (12), and heating the liquid material (13) to form the functional film. In addition, the groove pattern (12) may be combined with a liquid-repellent film (14). The liquid material can be used to form a high-density fine functional film (e.g. wiring pattern) on the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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