| 摘要 |
A piezoelectric/electrostrictive device includes: a ceramic substrate having a thick portion and a thin diaphragm portion; and a piezoelectric/electrostrictive element having a layered structure including a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode, and the thin diaphragm portion of the ceramic substrate is constituted to vibrate in conjunction with the driving of the piezoelectric/electrostrictive element. Furthermore, shape and dimension relations defined in the following (A) to (C) are satisfied: (A) a shape of the thin diaphragm portion 12 is an outward protruding arch shape, and an outward protrusion height of the arch shape is in a range of 5 to 50 mum; (B) a mounting width of the thin diaphragm portion is in a range of 600 to 2000 mum; and (C) a ratio (height/width) of the height to the width of the thick portion is in a range of 0.25 to 3.
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