发明名称 |
Surface inspection system with improved capabilities |
摘要 |
Pixel intensities indicative of scattered radiation from portions of the inspected surface surrounding a location of a potential anomaly are also stored so that such data is available for quick review of the pixel intensities within a patch on the surface containing the location of the potential anomaly. Where rotational motion is caused between the illumination beam and the inspected surface, signal-to-noise ratio may be improved by comparing the pixel intensities of pixels at corresponding positions on two different surfaces that are inspected, where corresponding pixels at the same relative locations on the two different surfaces are illuminated and scattered radiation therefrom collected and detected under the same optical conditions.
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申请公布号 |
US2006109457(A1) |
申请公布日期 |
2006.05.25 |
申请号 |
US20050243349 |
申请日期 |
2005.10.03 |
申请人 |
MILLER LAWRENCE R;VAEZ-IRAVANI MEHDI |
发明人 |
MILLER LAWRENCE R.;VAEZ-IRAVANI MEHDI |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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