| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter measuring method and a device capable of improving inspection accuracy of the foreign matter, and reducing the load of an inspector. SOLUTION: When detecting an intermingled foreign matter in an inspection object on a conveyor by image processing of a camera arranged over the conveyor, an illumination for irradiating the inspection object M from above is constituted of a coaxial illumination part 21 which is approximately coaxial B with an imaging shaft A of the camera 10, a reflection illumination part 25 by an approximately hemispherical reflecting surface 27 of a reflection part 26 formed over the conveyor 6, and a direct illumination part 29 from a lower part of the reflection part 26, to thereby put at least a surface part of the inspection object M into a shadeless state. Illumination light from each illumination part 21, 25, 29 is irradiated in the state where each color of RGB and UV can be combined in order to actualize the foreign matter according to the kind of the foreign matter, and an infrared light illumination 31 comprising LED's 32 arranged kin a matrix form is arranged under the conveyor 6, and inspection is performed by irradiating the inspection object M with infrared light through the conveyor 6. COPYRIGHT: (C)2006,JPO&NCIPI
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