| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a transparent conductive film showing a stable ohmic value, by appropriately evaluating film resistance. SOLUTION: The method for producing the transparent conductive film on a substrate comprises the steps of: measuring a film thickness of the transparent conductive film formed in a film production chamber 3; simultaneously measuring the ohmic value of the transparent conductive film formed in a subsequent evaluation chamber 4; and feeding a measured result of film thickness and the ohmic value back to a film production condition in the film production chamber 3 to form the transparent conductive film. COPYRIGHT: (C)2006,JPO&NCIPI
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