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发明名称
MICROLITHOGRAPHIC REDUCTION PROJECTION CATADIOPTRIC OBJECTIVE
摘要
申请公布号
EP1247132(B1)
申请公布日期
2006.05.24
申请号
EP20000990025
申请日期
2000.12.23
申请人
CARL ZEISS SMT AG
发明人
SHAFER, DAVID, R.
分类号
G02B17/08;G03F7/20;H01L21/027
主分类号
G02B17/08
代理机构
代理人
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