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发明名称
ECR-Plasmaquelle mit linearer Plasmaaustrittsöffnung
摘要
申请公布号
DE10341239(B4)
申请公布日期
2006.05.24
申请号
DE20031041239
申请日期
2003.09.08
申请人
ROTH & RAU AG
发明人
MAI, JOACHIM;ROTH, DIETMAR
分类号
H05H1/46;H01J37/32;H05H1/18
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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