ACTIVATION APPARATUS OF IMPURITY ATOM FOR SEMICONDUCTOR DEVICE MANUFACTURING AND ACTIVATION METHOD THEREOF,申请号KR20040094483-传众专利搜索

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发明名称	ACTIVATION APPARATUS OF IMPURITY ATOM FOR SEMICONDUCTOR DEVICE MANUFACTURING AND ACTIVATION METHOD THEREOF
摘要
申请公布号	KR20060055600(A)	申请公布日期	2006.05.24
申请号	KR20040094483	申请日期	2004.11.18
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, JUN SEUCK
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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