发明名称 Substrate including a deformation preventing layer
摘要 A substrate prevented from being deformed due to thermal stress or deposition stress includes a deformation preventing layer arranged on one surface of the substrate. The substrate can include a thin film transistor arranged on one surface of the substrate and the deformation preventing layer, arranged on the another surface of the substrate, and including at least one layer.
申请公布号 EP1659621(A1) 申请公布日期 2006.05.24
申请号 EP20050110914 申请日期 2005.11.18
申请人 SAMSUNG SDI CO., LTD. 发明人 KOO, JAE-BON;SHIN, HYUN-SOO;SUH, MIN-CHUL;MO, YEON-GON
分类号 H01L21/20;C23C16/02 主分类号 H01L21/20
代理机构 代理人
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