发明名称 |
Substrate including a deformation preventing layer |
摘要 |
A substrate prevented from being deformed due to thermal stress or deposition stress includes a deformation preventing layer arranged on one surface of the substrate. The substrate can include a thin film transistor arranged on one surface of the substrate and the deformation preventing layer, arranged on the another surface of the substrate, and including at least one layer. |
申请公布号 |
EP1659621(A1) |
申请公布日期 |
2006.05.24 |
申请号 |
EP20050110914 |
申请日期 |
2005.11.18 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
KOO, JAE-BON;SHIN, HYUN-SOO;SUH, MIN-CHUL;MO, YEON-GON |
分类号 |
H01L21/20;C23C16/02 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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