发明名称 |
A METHOD OF MAKING A MONOLITHIC MICROWAVE CIRCUIT WITH THICK CONDUCTORS |
摘要 |
<p>A monolithic microwave integrated circuit (MMIC) is produced by a method which forms multilevel conductive members, including thick low-loss metallic members. The low-loss metallic members are particularly useful for forming inductors and interconnecting circuit components. The MMIC is formed on a thick oxide layer of a silicon-on-insulator structure having a high-resistivity silicon substrate to inhibit RF interaction with the substrate.</p> |
申请公布号 |
EP0838090(B1) |
申请公布日期 |
2006.05.24 |
申请号 |
EP19970916615 |
申请日期 |
1997.04.30 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
KIM, MANJIN, J. |
分类号 |
H01L21/822;H01L21/84;H01L21/02;H01L21/316;H01L21/768;H01L23/482;H01L23/52;H01L23/66;H01L27/04;H01L27/06 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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