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发明名称
Abzugsvorrichtung
摘要
申请公布号
DE19906224(B4)
申请公布日期
2006.05.24
申请号
DE1999106224
申请日期
1999.02.15
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHNEIDER, GERMAR;SAEZ, PIERRE-LOUIS
分类号
H01L21/30;B08B15/00;H01L21/00
主分类号
H01L21/30
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代理人
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