PECVD of optical quality silica films,申请号EP20020252664-传众专利搜索

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发明名称	PECVD of optical quality silica films
摘要
申请公布号	EP1270762(B1)	申请公布日期	2006.05.24
申请号	EP20020252664	申请日期	2002.04.15
申请人	DALSA SEMICONDUCTOR INC.	发明人	OUELLET, LUC;GRONDIN, MANUEL;LACHANCE, JONATHAN;BLAIN, STEPHANE
分类号	C23C16/40;G02B6/13;C03B8/04;C23C16/50;C23C16/44;C23C16/56	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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