| 摘要 |
PROBLEM TO BE SOLVED: To provide a connecting structure of excellent reliability whereby the electrodes on the both surfaces are connected electrically striding over a corner part stretching in the longitudinal direction of the vibrating part, in an angular velocity sensor equipped with a vibrator in which electrodes are formed on the both perpendicularly intersecting surfaces extending in the longitudinal direction of the vibrating part of a quadrangular prism. SOLUTION: On one surface of a flat plate of piezoelectric body, an electrode film of a specified shape is formed through the printing and backing processes, and the piezoelectric body and electrode film are cut so that the Y2 plane, etc., become cut planes, and thereby a vibrator 1 in the form of tuning fork and electrodes 10-17 and 20 on X1 and X2 planes are formed. Then sensing electrodes 19... are formed on the Y2 plane, etc., and connection electrodes 21-24 are formed through the printing and hardening processes so that they pass the angle part E from the Y2 plane, etc., and dangle on the side of the takeout electrodes 14-17 and common electrode 20. |
