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摘要
申请公布号
JP3779161(B2)
申请公布日期
2006.05.24
申请号
JP20000619017
申请日期
2000.05.17
申请人
发明人
分类号
C23C14/06;H01L21/285;H01L21/28;H01L21/768
主分类号
C23C14/06
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