LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD

摘要

The present invention relates to a liquid delivery head, a liquid delivery device, and a process for production of the liquid delivery head, which are applicable to ink-jet printers of thermal type in which heating elements and transistors to drive them are integrally formed on the same substrate. The transistors are metal oxide field effect transistors which have a polycide gate or metal gate for reduction in parasitic resistance.