ELECTRO STATIC CHUCK OF SEMICONDUCTOR ETCH EQUIPMENT,申请号KR20040094944-传众专利搜索

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发明名称	ELECTRO STATIC CHUCK OF SEMICONDUCTOR ETCH EQUIPMENT
摘要
申请公布号	KR20060055787(A)	申请公布日期	2006.05.24
申请号	KR20040094944	申请日期	2004.11.19
申请人	HYNIX SEMICONDUCTOR INC.	发明人	KIM, SE JIN
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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