Method of manufacturing a microstructure

摘要

In a method of manufacturing a microstructure that requires a first material (6) and a second material (8) attached together and a laser system for producing a laser beam, the first material exhibiting an ablation threshold that does not exceed a predetermined ablation fluence of the laser beam and the second material exhibiting a second ablation threshold that exceeds the predetermined ablation fluence, a removal process comprises removing (16) a portion of the first material to leave a remnant thereof at an interface of the two materials and then, ablating (24) the remnant material using the laser beam at the predetermined ablation fluence to remove the remnant material. The process of selecting the first of the two materials is based on the predetermined ablation fluence of the laser beam, and the selection of a laser system is based on the respective ablation thresholds of the first and second materials.