Heater-equipped pusher, electronic component handling apparatus, and temperature control method for electronic component

摘要

A pusher is constituted by a pusher main body, which is capable of direct contact with an electronic component to be tested, a heat absorbing and radiating body provided on the pusher main body, a heater provided on the pusher main body to enable direct or indirect contact with the electronic component to be tested, and a thermal insulating material provided between the pusher main body and the heater. According to such a pusher, temperature control of an electronic component can be performed such that the electronic component nears a target set temperature for testing.