METHOD OF MAKING A SEMICONDUCTOR DEVICE BY BALANCING SHALLOW TRENCH ISOLATION STRESS AND OPTICAL PROXIMITY EFFECTS,申请号KR20050110790-传众专利搜索

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发明名称	METHOD OF MAKING A SEMICONDUCTOR DEVICE BY BALANCING SHALLOW TRENCH ISOLATION STRESS AND OPTICAL PROXIMITY EFFECTS
摘要
申请公布号	KR20060055414(A)	申请公布日期	2006.05.23
申请号	KR20050110790	申请日期	2005.11.18
申请人	AGERE SYSTEMS INC.	发明人	CHLIPALA JAMES D.;MOINIAN SHAHRIAR
分类号	H01L21/027;H01L21/762	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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