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发明名称
PLASMA ANNEALING OF SUBSTRATES TO IMPROVE ADHESION
摘要
申请公布号
KR100582218(B1)
申请公布日期
2006.05.23
申请号
KR20007007942
申请日期
2000.07.20
申请人
发明人
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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