摘要 |
An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container ( 10 ), more particularly after operation of a vacuum pump comprises an electron-emitting cathode ( 31 ) made by exploiting the nanotube technology, a grid ( 13; 33; 133; 133 ') for accelerating the electrons emitted by the cathode, and a plate ( 15; 35 ) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.
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