发明名称 Ionization vacuum gauge
摘要 An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container ( 10 ), more particularly after operation of a vacuum pump comprises an electron-emitting cathode ( 31 ) made by exploiting the nanotube technology, a grid ( 13; 33; 133; 133 ') for accelerating the electrons emitted by the cathode, and a plate ( 15; 35 ) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.
申请公布号 US7049823(B2) 申请公布日期 2006.05.23
申请号 US20040910104 申请日期 2004.08.03
申请人 VARIAN S.P.A. 发明人 CORREALE RAFFAELE
分类号 G01L21/30;G01L21/34;G01N27/62;H01J41/06;H01J41/10 主分类号 G01L21/30
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