METHOD FOR POSITIONING A SUBSTRATE AND INSPECTING APPARATUS USING SAME,申请号KR20030082468-传众专利搜索

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发明名称	METHOD FOR POSITIONING A SUBSTRATE AND INSPECTING APPARATUS USING SAME
摘要
申请公布号	KR100582695(B1)	申请公布日期	2006.05.23
申请号	KR20030082468	申请日期	2003.11.20
申请人		发明人
分类号	H01L21/66;B65B35/00	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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