| 摘要 |
A regenerative refrigerating apparatus which can increase the speed of cooling and heating a subject to be cooled. The specific constitution of the regenerating type refrigerating apparatus includes a pressure control means 4 having a compressor 4 a, a high pressure selector valve 4 b, and a low pressure selector valve 4 c, an expanding/compressing unit 1 having a room temperature end 1 a and a low temperature end 1 b, and a regenerating unit 2 having a room temperature end 2 a and a low temperature end 2 b, carries out heat transfer to a subject to be cooled, and is comprised of a flow path for working gas connecting the low temperature end 1 b of the expanding/compressing unit and the low temperature end 2 b of the regenerating unit with each other, and simultaneously extending to the subject to be cooled 7 . Consequently, it is possible to significantly increase the utilization ratio of the refrigerating apparatus, and to widely apply the refrigerating apparatus to sensors and semiconductor manufacturing apparatuses. |
