Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device

摘要

In a piezoelectric element comprising a first electrode 2 provided on a substrate 1 , a piezoelectric material 3 provided on the first electrode 2 and a second electrode 4 provided on the piezoelectric material 3 , the piezoelectric material 3 is configured so as to have a perovskite type crystal structure which is represented by a formula ABO₃ and in which the main component for the A site is Pb and the main components for the B site are Zr, Ti and Pb, and configured so that a ratio of Pb atoms to all atoms in the B site is more than 3% and not more than 30%. Namely, the piezoelectric material 3 is formed so as to contain Pb excessively and the excess Pb atoms are activated to be Pb⁴⁺ during formation of the piezoelectric material 3 and then introduced into the B site.