MASK FOR EUVL AND METHOD FOR FABRICATING THE SAME,申请号KR20050066990-传众专利搜索

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发明名称	MASK FOR EUVL AND METHOD FOR FABRICATING THE SAME
摘要
申请公布号	KR20060055304(A)	申请公布日期	2006.05.23
申请号	KR20050066990	申请日期	2005.07.22
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	SONG, I HUN;PARK, YOUNG SOO;CHANG, SEUNG HYUK;KIM, SUK PIL;KIM, HOON
分类号	H01L21/027;G03F1/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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