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发明名称
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE IMPROVING CHARATERISTICS OF SPACER NITRIDE
摘要
申请公布号
KR20060053784(A)
申请公布日期
2006.05.22
申请号
KR20040094228
申请日期
2004.11.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, KYONG MIN;KIM, YUN SIK;KIM, HWA SIK;YOU, SANG CHUL;KIM, BOO UP
分类号
H01L21/335
主分类号
H01L21/335
代理机构
代理人
主权项
地址
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