HIGH CURRENT DENSITY PARTICLE BEAM SYSTEM,申请号KR20050107899-传众专利搜索

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发明名称	HIGH CURRENT DENSITY PARTICLE BEAM SYSTEM
摘要
申请公布号	KR20060054143(A)	申请公布日期	2006.05.22
申请号	KR20050107899	申请日期	2005.11.11
申请人	ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH	发明人	FROSIEN JUERGEN;LANIO STEFAN;SCHOENECKER GERALD;BRODIE ALAN D.;CREWE DAVIS A.
分类号	H01J37/26;H01J37/28	主分类号	H01J37/26
代理机构		代理人
主权项
地址

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