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发明名称
BACKING PLATES FOR SPUTTERING TARGETS
摘要
申请公布号
KR20060054078(A)
申请公布日期
2006.05.22
申请号
KR20050098129
申请日期
2005.10.18
申请人
KOBELCO RESEARCH INSTITUTE,INC.
发明人
MOYAMA KAZUKI;MORIMOTO HIDEKAZU
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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