发明名称 |
Wafer Cleaning Apparatus |
摘要 |
|
申请公布号 |
KR100581495(B1) |
申请公布日期 |
2006.05.22 |
申请号 |
KR20030102172 |
申请日期 |
2003.12.31 |
申请人 |
|
发明人 |
|
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
|
代理人 |
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主权项 |
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地址 |
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