METHOD, APPARATUS AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND CLEANING METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS,申请号KR20020052265-传众专利搜索

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发明名称	METHOD, APPARATUS AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND CLEANING METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号	KR100581320(B1)	申请公布日期	2006.05.22
申请号	KR20020052265	申请日期	2002.08.31
申请人		发明人
分类号	C23C16/52;H01L21/00;H01L21/205;H01L21/302;H01L21/3065	主分类号	C23C16/52
代理机构		代理人
主权项
地址

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